Trichlorosilane

Trichlorosilane (HCl3Si) is a colorless fuming liquid with a pungent odor. The chemical's vapors and liquids cause burns. It is more dense than water and its vapors are heavier than air. Because it is flammable, we recommend a safe chemical storage building that meets specific regulations for storing Trichlorosilane. Please review our fire rated products: Flammable storage, DRUMLoc, FIRELoc

Trichlorosilane Storing Details

  • Flammable Details: Burns readily. Rapidly or completely vaporizes at atmospheric pressure and normal ambient temperature.
  • Storage Details: Keep separated from incompatible substances, such as oxidizers. Store and handle in accordance with all current regulations and standards. Store in compliant, approved flammables storage buildings, separated from oxidizers and sources of ignition.
  • Compatible Details:
  • Description: Trichlorosilane is an inorganic compound with the formula HSiCl3. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry.
  • Classification: CLASS 3, CLASS 8, CLASS 4.3
  • Brand Name: n/a

Trichlorosilane Properties

Formula Density Boiling Point; IUPAC ID Molar Mass Soluble In Melting Point
HCl3Si 1.34 g/cm³ 89.2°F (31.°C) n/a 135.45 g/mol n/a -195.°F (-126.°C)




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